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A MEMS electret energy harvester charged with soft X-ray after packaging is investigated, which should improve the long-term stability of electrets. A charging model for estimation of accurate charging time is developed, by considering attenuation of the soft X-ray at the lid material. The present model is verified with surface potential measurements of electrets. With a prototype MEMS electret energy...
In this report, an improved in-plane electret energy harvester with gap-closing comb drives has been developed with a single-mask SOI process. By using 150 µm-thick device layer for increasing the seismic mass and 15 µm-thick buried oxide layer for reducing the parasitic capacitance, up to 5.3 µW output power has been obtained at 503 Hz, which is equivalent of five times higher power output than our...
X-shaped high-aspect-ratio parylene spring has been proposed for MEMS electret energy harvester in order to suppress the rotational motion of the seismic mass. A MEMS harvester prototype with the X-shaped spring is successfully microfabricated with parylene trench filling technology. The rotational angle has been reduced to 1/5 with the present spring structure, and 1.5 μW output power is obtained...
We propose a novel low-voltage droplet manipulation method ??liquid dielectrophoresis on electret (L-DEPOE)?? with superlyophobic surfaces (SLS), which enable high contact angle and low flow friction for water and oil. Charge stability of electret in liquid is much improved with new polymer coating, and SLS with electrodes are successfully fabricated, showing high mechanical robustness and extreme...
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