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In recent years, with the wisdom of the city promote and research in the field of geographic space unceasingly thoroughly, the mass spatial data storage management and multiple concurrent access has become the research hotspot in the field of geosciences. Traditional spatial data storage is based on relational database, modeling, index mechanism, cache management and task scheduling method to realize...
Yield impacting systematic defects finding is no longer just relied on Design Rule Checking (DRC) provided by designer or Lithography Rule Checking (LRC) provided by post-optical proximity correction (OPC) results. An inspection flow is proposed in this paper, which is combining the inspection KLA tool and Hotspot Pattern Analyzer (HPA) database software to do the systematic defects filtering, sorting,...
• Review/Inspector Cycle Optimization Methodology : □ Integrate the parameters of the inspection machine and review images at the same time. Nuisance rate is reduced significantly, and therefore the sensitivity and productivity of inspectors and review tools are also improved. • Suppress the Bright Field Inspection Nuisance Rate: □ Base on the reviewed patch images information and feasible threshold...
• Key Technology for Invisible Defects Detection: Electron beam inspection (EBI) system using the Leap & Scan mode with external electric field is a key technology for root cause analysis of invisible defects. • Issues in Continuous Inspection Mode : Continuous inspection mode suffers serious misalignment and low voltage contrast issues, it is hard to inspect the irregularly periphery area. •...
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