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In this paper, aiming at the characteristics of high-power full-bridge inverter, a new IGBT control and drive circuit is designed, in which UCC3895, a phase shift and dead-time control chip, MC33152, a high-speed dual-phase driver, and PT6 isolation transformers consist the core part. The circuit can regulate its frequency, phase angle and dead-time, while possessing following features: short turn-on/off...
With the rapid development of the semiconductor chip, the lithography applied to the ICs is facing great challenges. Compared to the traditional optical lithography, extreme ultraviolet lithography (EUVL) is regarded as one of the most promising technique among the next generation lithography. Among all EUVL system, the EUV source is key issue. Compared with other light sources, the discharge produced...
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