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This paper presents design, fabrication, and measurement of a Ku-band micromachined bandpass filter. The fourth-order interdigital filtered based on step-impedance resonators (SIRs) is fabricated and self-packaged by three high-resistivity(> 10K??cm) silicon wafers to achieve compactness and low loss. The proposed circuit is designed to produce a passband of 21% centered at 14.2 GHz. Experimental...
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