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The influence of the Ti–Si cathode grain size on cathodic arc processes and resulting Ti–Si–N coating synthesis has been studied. 63mm Ti–Si cathodes containing 20–25at.% Si with four dedicated grain size of ~8μm, ~20μm, ~110μm, and ~600μm were fabricated via spark plasma sintering or hot isostatic pressing. They were evaporated in 2Pa nitrogen atmosphere in an industrial-scale arc deposition system...
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