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This work focuses on the study of the optical properties of nanolaminate films of Al2O3-Y2O3 bilayers. Nanolaminates were grown by means of thermal atomic layer deposition (ALD). The multilayer thickness, refractive index and optical bandgap were studied via spectroscopic ellipsometry. Ellipsometric data revealed an increase of the refractive index from 1.9 to 2.2 at 190nm wavelength when the bilayer...
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