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The dielectric functions of thin film silicon materials on glass were measured by spectroscopic ellipsometry (SE) and simulated by using the Tauc-Lorentz (TL) dispersion law, which provided information on disorder (C) and density (A). A VHF plasma-deposited sample made at 100°C with an optimum hydrogen dilution shows density (relative packing density of Si–Si bonds as estimated by SE) and structural...
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