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Carbon nanotube (CNT) vertical interconnects (vias) were fabricated on conductive substrates at a record-low temperature of 350°C, using only standard semiconductor manufacturing techniques and materials. CNT growth rates were investigated for both Co and a Co–Al alloy catalysts, and compared to that of Fe. The activation energy of the Co-based catalysts was found to be lower, allowing lower temperature...
Multi-walled carbon nanotubes (MWCNT) and carbon nanofibers (CNF) were created using chemical vapor deposition at growth temperatures between 500 and 750°C, which have increasing crystallinity with increasing growth temperature. We used Raman spectroscopy to analyze the samples. The intensity ratios compared to the G-band, and full-width at half-maximum, of all observable Raman bands in both the first...
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