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This paper proposes a physics-based variability prediction model integrating the effects of plasma-induced damage (PID) in advanced LSIs. We focus on charging damage to high-k gate dielectrics and physical damage (Si recess by ion bombardment). In addition to gate length-variation which has been discussed so far as a dominant factor for (static) variability, we demonstrate how PID impacts on - increases...
Delay profile of wideband indoor channel fluctuates for a physical change such as intruder. This paper investigates a human body detection using the wideband radio at 2.4 GHz (ISM band) in order to protect a house, not a room, because the radio with high range resolution can penetrate into the inner walls and also the reflected paths from human body are discriminated in time domain. The usefulness...
Ultra-wideband impulse-radio (UWB-IR) channel with omni-directional antenna was experimentally investigated inside a vehicle body with passengers where the interference power out-radiated from the vehicle is also discussed. From the result, the RMS delay spread and average delay, which are considerably degraded as compared with the use of directional antenna, are likely to decrease in proportion with...
Polarities of plasma charging damage in n- and p-channel MOSFETs with Hf-based high-k gate stack (HfAlOx/SiO2) were studied for two different plasma sources (Ar-and Cl-based gas mixtures), and found to depend on plasma conditions, in contrast to those with conventional SiO2. For Ar-plasma, which was confirmed to induce a larger charging damage, both n- and p-ch MOSFETs with high-k gate stacks suffer...
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