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This paper presents the fabrication of an ultra-thin tag for identification and sensing applications in extremely small implantable regions. Particularly, we are demonstrating the capability to create a telemetry system which is implantable in a mouse eye. This system will eventually be able to monitor intraocular pressure (IOP). The small size of the mouse eye presents challenges for surgery and...
This paper presents for the first time a novel concept for monitoring the resonant frequency of electrostatic MEMS tunable high-Q evanescent-mode cavity resonators through capacitance measurement. The proposed scheme relies on the fact that there is a one-to-one correspondence between the actuation capacitance Cs and the resonant frequency f0. This relationship is derived theoretically using a spring-mass...
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