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A MEMS (Micro-electro-mechanical systems) fluid viscosity sensor with resonant trapezoidal micro cantilever is introduced in this paper. The fluid viscosity can be measured through the relationship between the fluid viscosity and the quality factor, the resonant frequency of the micro cantilever immersed in the fluid. In order to improve the sensitivity of the viscosity sensor, the geometry of the...
The working principle and fabrication process of MEMS density sensor have been studied in this paper. And the density experiments were performed in acetone and silicon oil at temperatures in the range from 20.0 to 50.0 °C under atmospheric pressure. The maximum deviation and the average absolute deviation between the density experimental results and the reference values are −0.72% and 0.32%, respectively...
A novel dc current sensor based on magnetically actuated resonant piezoresistive microcantilever is proposed. The sensor measures the dc current by detecting the shift of resonant frequency of the microcantilever. A detailed theoretical study on the relationship between the current and the cantilever's resonant frequency is also given. To reduce force and displacement noise, the microcantilever works...
The LC series-resonant converter is one of the most attractive DC/DC converters in the world. In this paper, for design of a LC series-resonant DC/DC converter, an improved design method is proposed based on first harmonic analysis (FHA). Based on analysis about LC series-resonant converter's voltage gain characteristic, zero voltage switching (ZVS) and zero current switching (ZCS) restrictions, the...
The LC resonant converter is one of the most attractive DC/DC converters in the world. In this paper, for design of a LC resonant DC/DC converter, an improved design method is proposed based on first harmonic analysis (FHA). Based on analysis about LC resonant converter's voltage gain characteristic, zero voltage switching (ZVS) and zero current switching (ZCS) restrictions, the weakness that the...
A rectangle cantilever-type micro density sensor was researched based on MEMS (Micro Electro-mechanical System) technology. A Ti-Pt-Au coil and a Wheatstone full bridge were made on the top of the rectangle cantilever-type sensitive chip. The sensitive chip was placed in uniform strong magnetic field. The resonant frequency of the sensitive chip was changed with the change of the AC current's frequency...
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