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To investigate the plasma recovery during the fall time of a high voltage pulse, a numerical model is developed by applying fluid equations for ions while assuming thermal equilibrium for electrons. In the model, effects of the circuit impedance of pulse system are taken into account. The numerical analysis reveals that the plasma recovery is affected by both the properties of plasma and internal...
The analysis of the repetitive pulse discharge system for the plasma source ion implantation is investigated with both circuit simulation and experiment. In the circuit model, the ion and electron currents on a target are self-consistently varied with the applied voltage because the waveforms of repetitive pulse are affected by the internal properties of plasma, as well as the external circuit parameters...
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