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Molybdenum thin films are widely used as e.g. diffusion barriers in very large-scale integrated circuits and thin film transistor displays. For better understanding of the evolution of structure and properties, films with different thicknesses have been grown on glass substrates by magnetron sputter deposition. A comprehensive relationship between film thickness, microstructure, stresses and resistivity...
The aim of this work is to analyze thermal fatigue in hard coatings/substrate composites (i) during slow heating and cooling and (ii) after local cyclic thermal laser pulse experiments. As a model system, CrN coatings with a thickness of 3µm deposited on steel, hard metal and Si(100) substrates using reactive magnetron sputtering at a temperature of 350°C are used. The coatings are at first characterized...
Morphology, structure and thermal behavior of magnetron sputtered TiN/Ag multilayer thin films deposited at 150 °C with a bilayer thickness Λ in the range of 75–600 nm are characterized. The films are thermally cycled and the relationship between bilayer thickness Λ, film structure and stress development is analyzed. The results indicate that the residual stresses in the as-deposited films and the...
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