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A new method based on the conventional base-catalyzed Sol-Gel process has been proposed for making porous SiO 2 thin films in this paper. Silicon alkoxide (TEOS) was hydrolyzed and condensed in water under the action of the base catalyst (NH 4 OH) without ethanol, and then acetic acid was added to the SiO 2 gel solution to slow down the speed of condensation and delay the growth...
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