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In the infrared region of the spectrum thermoelectric detectors such as the thermopile are extensively used. These detectors rely on the well-known Seebeck effect, in which there is a direct conversion of thermoelectric differentials into electrical voltage. The temperature difference over thermocouple junctions is in general, created by forming a thin membrane connected to the silicon bulk. In many...
In this paper we present the development and characterization of thermopile detector on a 4 mum thin self-supporting membrane made of the epoxy based photoresist SU-8. The membrane is realized using silicon bulk micromachining techniques. In many existing thermopile detectors, a temperature difference over the thermocouple junctions is achieved by connecting a thin membrane of either Si or Si3N4 to...
We present the design, fabrication and characterization of vertical thermopile infra-red (IR) sensors. The sensors are produced in batches in a standard flexible printed circuit board (flex PCB) material. The vertical design opens up for large area detection and longer thermopile chains. The sensors consist of series of 88 vertically interconnected thermocouples in a 75 mum thick polyimide foil (Kapton...
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