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Carbon nitride (CNx) bilayer films with Ti and TiN interlayer were synthesized by cathode arc technique at various nitrogen pressures (PN2). The dependences of microstructure and bonding composition of the films on the PN2 and interlayer were analyzed by Raman spectroscopy and X‐ray photoelectron spectroscopy. Microstructure evolution consisting of the ordering and size of Csp2 clusters, the faction...
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