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Test structures are key elements to characterise and identify the main contributors to yield loss in wiring structures. Among such monitors, comb–meander–comb structures have been widely used owing to their simplicity and reduced number of pads. With continuous scaling of dimensions and use of copper in interconnections, open defects has arisen as the most common defect affecting the interconnection,...
Full open defects on interconnect lines cause broken wires to become floating. The voltage of a floating line depends on its topological characteristics, namely parasitic capacitances to neighbouring structures, transistor capacitances of the downstream gate(s) and trapped charge. However, in nanometer CMOS technologies gate oxide thickness is reduced below a few tens of A, resulting in the gate tunnelling...
Full open defects on the interconnect lines cause the broken wires to become floating. The voltage of a floating line depends on its topological characteristics, namely: parasitic capacitances to neighbouring structures, transistor capacitances of the downstream gate(s) and the trapped charge. However, in nanometric CMOS technologies, the oxide thickness is reduced below a few tens of Aring causing...
Interconnecting lines with full open defects become floating lines. In nanometric CMOS technologies, gate tunnelling leakage currents impact the behaviour of these lines, which cannot be considered electrically isolated anymore. The voltage of the floating node is determined by its neighbours and leakage currents. After some time an equilibrium is reached between these effects. Theoretical analysis...
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