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CMUT efficiency depends on a high electric field over a thin vacuum gap and a dielectric isolation layer. Ideally this high electric field should only exist over the vibrating membrane of the CMUT, but electrical connections between the membranes usually pass over thin dielectric isolation layers (Fig. 1). The resulting high fields on the isolation layer cause charging, dielectric breakdown and reduces...
Higher transmit sensitivity and receive sensitivity at lower bias voltages would be achieved by CMUTs when their structure converges to an ideal parallel plate structure without an insulation layer. Using an insulation layer with high relative dielectric constant (high-K) helps achieving this goal with increased capacitance and large electric field in the vacuum gap. The effect of the insulation layer...
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