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This paper describes the surface profile measurement of a XY-grid workpiece with sinusoidal microstructures using an atomic force microscope (AFM) on a diamond turning machine. The sinusoidal micro-structures, which are fabricated on an aluminum plate by fast tool servo-assisted diamond turning, are a superposition of periodic sine-waves along the X- and Y-directions (wavelength (XY): 150μm, amplitude...
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