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This paper reports a microendoscopic confocal imaging probe based on a large-vertical-displacement (LVD) microlens scanner. Photoresist reflow technique is used to form a microlens on a lens holder that is integrated with a LVD microactuator. With a footprint of 3 mmtimes2 mm, the LVD microlens scanner can vertically displace the integrated polymer microlens by 0.7 mm at a dc voltage of 23 V. The...
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