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In this work we study the structure of Pulsed Laser Deposited silver-containing amorphous carbon a-C:Ag and AlN:Ag composites. The films have the form of a dielectric matrix (a-C or AlN) incorporating metal nanoclusters of 3–10nm diameters. The composition of the films and the crystal structure of the inclusions have been determined by in-situ Auger Electron Spectroscopy and transmission electron...
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