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Experimental results are presented on the ablation of SiC ceramics in air under irradiation with XeCl and ArF excimer laser beam. X-Ray photoelectron spectroscopy analysis reveals the enrichment of the ablated areas in Si under laser beam energy densities of 1–3.5 J cm −2 . At higher energy densities the ablated areas contain Si oxide. The non-stoichiometric ablation of SiC allows one to activate...
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