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The effect of ZnO under layers on crystal growth of TiN thin films was investigated. TiN single layers and double-layered ZnO/TiN thin films were deposited on soda-lime-silicate glass substrates by magnetron sputtering. XRD analysis indicated that TiN single layers exhibited {111} preferred orientation on glass substrates; on the other hand, the TiN thin films with {100} preferred orientation were...
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