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Lead lanthanum zirconate titanate (PLZT) film with an array of air-holes was successfully fabricated on a platinum-deposited (001) magnesium oxide substrate using a sol–gel method with a resist mold. A PLZT precursor solution was cast into a mold with resist pillars patterned using electron-beam lithography. After removing the resist pillars and applying a firing process, a PLZT ceramic film with...
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