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We are reporting comprehensive efforts for development and characterization of thin film PECVD a:SiH and TCO materials, and novel surface modification techniques to enhance solar cell performance. All process development and cell fabrication was conducted on 200 mm substrate wafers on CMOS manufacturing platform tools. Entire process parameter space of our PECVD tool was explored to enable increased...
This paper describes our progress achieved in thin-film free-standing monocrystalline silicon (FMS) solar cells by layer transfer process using porous silicon. The highest cell efficiency achieved for a 1times1 cm2 FMS solar cell is 13.5% with an open circuit voltage Voc=612 mV, current density Jsc =28.9 mA/cm2 and fill factor of FF=76.7%. In the effort of scaling-up of the cell area, the lift-off...
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