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The fabrication of 2-D periodic arrays of nickel metal dots using polystyrene (PS) nanosphere lithography and the interfacial reactions of the Ni dot arrays on (001) Si substrates after different heat treatments have been investigated. The epitaxial NiSi 2 was detected to start growing in samples after annealing at 300°C. As the annealing temperature was increased to 350–800°C, only epitaxial...
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