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In this study, a micro-probe electrode array with independent interconnections through the substrate has been developed using LRS(Low Resistance Silicon) via and glass reflow process. The silicon vias have electrical resistance less than 2 Ω because the boron ion in the borosilicate glass wafer can diffuse into the LRS pillars during glass reflow process. The LRS wafer was etched with double DRIE...
This paper presents the new concept of RF MEMS silicon contact switch and its verification for high isolation at 50-110 GHz. A high isolation is achieved by locating the floating top contact electrode 30 ??m apart from the bottom coplanar waveguide (CPW) signal line in lateral direction at initial off-state. The switch contact is realized by the dual axis movement, namely a lateral movement by comb...
We focus on reliability-based tests of one-axis single crystalline silicon micromirrors and performance in space environments. Reliability testing inhere shows how to deal with fabrication misalignment, charging effect, settling time reduction, shock and vibration in space, stiction in humidity, and reflectivity degradation related to outgassing. The micromirror in the international space station...
We report on the design, fabrication and experiment of a 2-DOF silicon scanning micromirror. We propose sloped electrodes to increase a maximum scan angle with a simple fabrication process. A delayed electroplating technique is adopted to fabricate the sloped profile of the electrodes over the patterned seed layer. We fabricated the 2-DOF scanning mirror which has different type of electrodes beneath...
This paper presents the charging mitigation method at single crystalline silicon micromirror by means of improving the geometry around electrodes. We have now determined that tilt angle drift and stiction are due to the charging effect, and that the effect can be enormously reduced by floating field limiting shields around the electrodes and dielectric geometry. While 0.5 degrees drift was measured...
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