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Positron annihilation spectroscopy is used to characterize pore sizes and their interconnectivity for porous low dielectric constant methyl-silsequioxane thin films, which are templated by triblock copolymers. More than 1 μm of ortho-positronium (o-Ps) diffusion length has been observed for certain films, indicating high interconnectivity of pores. S parameters from Doppler broadening of annihilation...
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