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The indentation behavior of metal/ceramic multilayered thin films is studied numerically using the finite element method. The axisymmetric model consists of alternating aluminum (Al) and silicon carbide (SiC) layers above a silicon (Si) substrate, with the rate-dependent viscoplastic response of Al accounted for. Different unloading rates, with and without a hold period at the peak indentation load,...
The mechanical properties of sol-gel-deposited lead zirconate titanate (PZT) thin films have been studied using nanoindentation method. This permitted a determination that the sol-gel derived PZT (53/47) films display an elastic modulus, approximately 123 GPa, much higher than that of bulk PZT ~ 68 GPa. The thin films exhibit hardness between 7 and 8 GPa, slightly lower than that of bulk PZT ~ 9 GPa...
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