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Recently, in high precision positioning field, the improvement of the positioning accuracy is required for the development of the next generation technology like nano-technology. In many industry application machines, we can often see the repetitive operation [?]. For the repetitive position command of the positioning machine, the investigation for the suppression of the repetitive tracking error...
The purpose of this paper is implementation of fast imaging of AFM. In general AFM, the image is obtained from the control input of the Z-scanner. In this case, Fast imaging is prevented by the resonance peak of the plant. In authors' research group, the surface topography observer which is the surface topography estimating method based on the observer theory has been proposed. In this paper, the...
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