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Periodic pyramid and random nanostructure binary structures of single-crystal silicon wafer was fabricated by chemical etching method. Much lower reflectance of silicon wafer with these structures was obtained compared with that of single pyramid arrays. The morphology and reflectivity of these structures, as well as the influence on nanostructures caused by rapid thermal annealing (RTA) time and...
The non-uniformity and anisotropy of Au/Si reaction, which results in the formation of craters at the Au/Si bonding interface, are investigated. The non-uniformity of Au/Si reaction is due to the native oxide on the bare Si surface. A different interfacial morphology of Au/Si bonding is observed and explained by a proposed model. To achieve a uniform bonding interface, a Ti/Au layer is deposited onto...
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