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This paper reports compact, wideband, low-dispersion, metamaterial-based phase shifters with lower loss, wider bandwidth, and fewer MEMS switches than previous designs. The present design is based on a novel 90° unit cell which uses two synchronized MEMS switches that are actuated and unactuated in unison for the through and delayed states, respectively. By combining three of these 90° unit cells...
Novel phase shifters were designed by using only two MEMS switches to control a metamaterial-based slow-wave structure in each unit cell. A unit cell with an area smaller than 1 mm2 exhibited a phase shift of 54±15°, an insertion loss of less than 0.9 dB, and a return loss of higher than 15 dB between 12 GHz and 18GHz. Modeling not only agrees with the measured data, but also points out possibilities...
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