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Enhanced light extraction and beam shaping of GaN-based vertical-injection light-emitting diodes (VI-LEDs) employing biomimetic surface structures were demonstrated. The biomimetic surface structures were fabricated using self-assembled polystyrene nanospheres serving as a monolayer mask, and followed by anisotropic inductively coupled plasma reactive ion etching. The light output power of the VI-LEDs...
The surface nipple arrays were formed by self-assembled polystyrene nano-spheres and inductively coupled plasma etching. The light output power of the vertical-injection LEDs with nipple array shows 68% enhancement than that of without the nipple array at a driving current of 350 mA.
In this work, we fabricated GaN hollow nanorods by using inductively coupled plasma (ICP) etching. We found that tops of these nanotubes were hexagonal with the c-axis perpendicular to substrate surface. We also found that density of the GaN nanorods were not strongly dependent on etching parameters, which suggests that the formation of these GaN nanotubes was related to the dislocation density in...
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