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This paper addresses an innovative solution to develop a circuit to perform accelerated stress tests of capacitive microelectromechanical-system (MEMS) switches and shows the use of instruments and equipment to monitor physical aging phenomena. A dedicated test circuit was designed and fabricated in order to meet the need for accelerated techniques for those structures. It integrated an in-house miniaturized...
The present work investigates the influence of dielectric film deposition method on the charging behavior of RF-MEMS capacitive switches, stressed by electrostatic discharges. A transmission line pulsing generator is used to produce the short transient event. The results show two simplified charging mechanisms influenced by discharges. The comparison between two silicon nitride confirms the effect...
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