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TaON–Ag nanocomposite thin films with Ag nano-particles emerged on TaON surface were prepared by reactive co-sputtering of Ta and Ag in the plasma of O 2 , N 2 , and Ar. The deposition temperature was 300°C. The Ag contents were 2.4, 5.0, 10.6at.% respectively. After deposition, some samples were annealed at 800°C by rapid thermal annealing (RTA). These films were characterized by...
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