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A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition...
We designed, fabricated, and experimentally demonstrated a dynamically balanced z-axis MEMS vibratory gyroscope utilizing the concentrated suspension architecture. This architecture allows for a high degree of structural symmetry (degeneracy of modes), potentially enabling high precision Rate Gyroscopes (RG) and Rate Integrating Gyroscopes (RIG). The full dynamic balance of the design is enabled by...
A new bio-inspired multi-band directional MEMS microphone based on the hearing properties of the fly Ormia ochracea is presented, together with the behavioral influence of 3D-printed housings. The multi-user foundry fabricated microphone operates on four frequency bands, all below 10 kHz and acts as a pressure gradient directional microphone with figure of eight polar pattern, or as an omni-directional...
We report on a new design approach for X-Y symmetric resonator, that can be mechanized as rate (RG) or rate-integrating gyroscope (RIG), with a single digit as-fabricated frequency split between the two mechanical out-of-phase operational modes. We explore concentration of critical mechanical elements (shuttle-spring-anchor modules) close to the center of the die to mitigate the effect of the fabrication...
An acceleration latching switch with integrated normally Open/Close paths is presented in this paper. Two arch trusses used as fracture parts of the normally-close path are connected in series to form the normally close path, which will be broken and latched by the latching mechanism to reach the open state once the input acceleration beyond threshold. Moreover, the normally-open path is consisted...
A micro-acceleration latching switch with barb latching mechanism is presented in this paper. The latching mechanism which likes a “barb” can make the switch latch reliably. What's more, the flexible contacts can prevent the switch from opening due to impact resulting from the rebound or vibration of proof mass when the switch is latched. The stops which limit displacement will also improve the reliability...
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