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Nanostructured multiphase zirconium aluminium oxide (MP-ZrAlO) composite films are deposited on zirconium substrate by plasma focus device. The XRD results reveal that the crystallinity of ZrO2 and Al2O3 phases is improved for 15 focus deposition shots (FDS), while it is decreased with increasing sample angular positions. A better crystallinity of m-ZrO2 and c-ZrO2 phases is achieved at 300°C annealing...
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