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This paper investigates the autocalibration of microelectromechanical systems (MEMS) triaxial accelerometer (TA) based on experimental design (DoE). First, for a special 6-parameter second-degree model, a six-point experimental scheme is proposed, and its G-optimality has been proven based on optimal DoE. Then, a new linearization approach is introduced, by which the TA model for autocalibration can...
In this paper, we proposed a novel method for autocalibration of triaxial Micro-Electro-Mechanical systems (MEMS) accelerometer that does not require any sophisticated laboratory facilities. In particular, this method is an online calibration method which can be conveniently implemented with the accuracy of MEMS accelerometer being significantly improved. The procedure exploits the fact that the output...
A novel MEMS distributed phase shifter for D-band application is presented, in which the open-ended CPW lines in series with MEMS bridge provides exactly capacitance in order to optimize the instability caused by the MEMS bridge movement and meet the required loaded capacitance. The planar structure of open-ended CPW lines could enhance the reliability and avoid performance degradation because of...
This paper presents an new modeling method that RF MEMS device is divided into some typical structures, which can be considered as different transmission lines and be modeled respectively to get equivalent circuit model of the device by cascading. Applying the modeling method to DMTL, the equivalent circuit model and the relationship between model parameters and physical size are obtained after MEMS...
A wideband MEMS switch with the operating frequency up to 250GHz using standard BiCMOS process in cluding embedded RF-MEMS structure has been presented in this paper. Collaborative design and optimization of mechanical characteristics and RF characteristics are carried out to guarantee the mechanical reliability. By adopting π-type circuits topology with low impedance t-line, the MEMS switch results...
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