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The electrical probe (Langmuir probe) diagnostics of different plasma parameters and operation regimes (E/H modes) of magnetic pole enhanced, inductively coupled (MaPE-ICP) argon plasmas are investigated. It is shown that uniform, high density (ne ∼ 1012 cm-3) and low electron temperature (Te ∼ 1.5 eV) plasma can be produced in low pressure argon discharges at a low power (100 W). It is found...
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