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A plasmonic resonator system composed of a metal-insulator-metal waveguide coupled with a disk and a ring cavity was proposed to produce double Fano resonances, which resulted from the coupling between the narrow discrete resonances of the ring cavity and the broad spectrum of the disk resonator. Based on the proposed structure, end-coupled cavities are added to form new coupled plasmonic resonator...
We propose CMOS-compatible multi-layered waveguide system for silicon hybrid integration. Numerical simulation of vertical light coupling between different layers, and fabrication of dual-layered waveguide devices for multiple die-to-wafer bonding are performed, suggesting the integration feasibility.
The development and assessment of ArF technology in a 200mm FAB line are described. Wafer-level measurement is implemented to explore the dummy pattern effect on cross-wafer uniformity and examine fundamental Si photonics devices.
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