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A range of SiO x -like coatings was deposited on glass slides from a hexamethylsiloxane precursor by plasma-assisted CVD. The effect of varying deposition parameters, specifically ion cleaning time and HMDSO/O 2 ratios, on the coating properties and antifouling performance was investigated. At low HMDSO/O 2 ratios, the resulting coatings were close to SiO 2 . Carbon...
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