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The thin film deposition property and the process difference during the wafer size migration from 12″ (300 mm) to 18″ (450 mm) in the Chemical Vapor Deposition (CVD) equipment is improved and reduced, respectively, when the chamber hardware is designed with the help of 3D full chamber modeling and 3D experimental visual technique developed in this work. The accuracy of 3D chamber simulation model...
The thermo-elastic strain is induced by through silicon vias (TSV) due to the difference of thermal expansion coefficients between the copper (∼18 ppm/°C) and silicon (∼2.8 ppm/°C) when the structure is exposed to a thermal ramp budget in the three dimensional integrated circuit (3DIC) process. These thermal expansion stresses are highly enough to introduce the delamination on the interfaces between...
Brassica rapa L. ssp. chinensis (L.) Hanelt is an important vegetable in eastern Asia. Its leaf area is one of main factor of influencing on the yield of individual plant. To reveal the mechanism of the leaf expansion, the joint segregation analysis of multiple generations (P1, P2, F1, B1, B2 and F2) was used to analyze the genetics of leaf expansion trait in combination SW-13×L-118 of Brassica rapa...
In this paper, we present a representation method for motion capture data by exploiting the nearly repeated characteristics and spatiotemporal coherence in human motion. We extract similar motion clips of variable lengths or speeds across the database. Since the coding costs between these matched clips are small, we propose the repeated motion analysis to extract the referred and repeated clip pairs...
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