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This paper presents evaluation of the effective Young's modulus of electroplated gold micro-cantilevers. Young's modulus is one of the fundamental parameters to design MEMS (microelectromechanical systems) components. Gold electroplated MEMS structures can be used to develop highly-sensitive MEMS sensors, such as accelerometers. With a resonant frequency method, we evaluate gold-electroplated Ti/Au...
In this paper, a micromechanical resonator utilizing single crystal Si and CMOS ASIC is presented. First, the critical parameters are optimized by theoretical calculation and fine tuned by finite-element-analysis (FEM). Then, SOG-bulk micromachining and deep reactive ion etching (DRIE) are adopted to fabricate the resonator as well as a glass wafer is used as the substrate to support the device, metal...
In summary, this study successfully demonstrates the design and implementation of high performance CMOS condenser microphones. Microphone with a flat frequency response between 100 Hz~20 KHz have been fabricated in a reproducible way. The interlace slots structure not only reduce the intrinsic stress of diaphragm also changing the stiffness of diaphragm and shrink the size of membrane. The major advantage...
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