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In this paper, thin film piezoelectric ultrasonic transducers with a two electrode design and various different membrane sizes were manufactured and characterized. The transducers were fabricated on a silicon wafer by chemical solution deposition (CSD) where PZT was deposited with a total thickness of ~2 ??m. Afterwards, cavities were wet etched underneath the piezoelectric layer creating bending...
An industrializable process for manufacturing of piezoelectric ultrasound transducer elements is demonstrated. The PZT film is deposited by chemical solution deposition on SOI wafers, and standard MEMS processes are utilized to make cantilevers, bridges and membranes. The PZT film of -50% of the devices exposed to thermal aging were found to fail at 85degC - 85%RH (relative humidity), while a real-life...
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