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Presented is a piezoresistive absolute micro pressure sensor for altimetry. This investigation involves the design, fabrication and testing of the sensor. By analyzing the stress distribution of sensitive elements using finite element method (FEM), an improved structure is built up through introducing multi islands and sensitive beams into traditional flat diaphragm. The proposed configuration...
A new type of resonant pressure sensor is presented which is realized by combination of a double-ended tuning fork (DETF) quartz resonator and a silicon diaphragm. To examine the feasibility and investigate the performance of this innovation, theoretical analysis and finite elements method are employed to optimize the structure parameters. Micromachining technology are involved in the fabrication...
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