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The Micro Electro Mechanical Systems (MEMS) density sensor is developed to achieve in-situ measurement of fluid density rapidly. The sensor's sensitive chip with a rectangular microcantilever is fabricated using MEMS technology. In the sensitive chip, an Au coil and four piezoresistors are fabricated on the rectangular microcantilever. When the sensitive chip is placed in the uniform magnetic field...
The working principle and fabrication process of MEMS density sensor have been studied in this paper. And the density experiments were performed in acetone and silicon oil at temperatures in the range from 20.0 to 50.0 °C under atmospheric pressure. The maximum deviation and the average absolute deviation between the density experimental results and the reference values are −0.72% and 0.32%, respectively...
The magneto hydrodynamic (MHD) propulsion by surfaces is performed by the total force of reaction electromagnetic body force (i.e. Lorentz force, LF) and hydrodynamic forces. The electromagnetic body force with certain spatial distribution in navigating model's surfaces and fluid boundary layer is generated by near-wall electromagnetic and magnetic fields. The surfaces of the navigating model are...
A rectangle cantilever-type micro density sensor was researched based on MEMS (Micro Electro-mechanical System) technology. A Ti-Pt-Au coil and a Wheatstone full bridge were made on the top of the rectangle cantilever-type sensitive chip. The sensitive chip was placed in uniform strong magnetic field. The resonant frequency of the sensitive chip was changed with the change of the AC current's frequency...
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