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The Cu(II)-catalyzed Fenton-like reaction was found to be significantly accelerated in the presence of chloride ion (i.e., the Cu(II)/H2O2/Cl− system), enhancing the oxidative degradation of organic contaminants at neutral pH. The degradation of carbamazepine (a select target contaminant) by the Cu(II)/H2O2 system using 1μM Cu(II) and 10mM H2O2 was accelerated by 28-fold in the presence of 10,000mg/L...
Cu has replaced Al for interconnection material in ultra large integrated circuit (ULSI), resulting in reducing the RC delay and achieving higher electro-migration reliability. However, it becomes more difficult to form reliable Cu wire as the feature size more decreases. For successful electrochemical plating (ECP) filling, continuous Cu seed layer with low resistivity and conformallity is essentially...
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