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In the present study, p-type BixSb2−xTe3 thermoelectric thin films with various chemical compositions were fabricated by a magnetron co-sputtering process. The influence of Bi content (x) on the microstructures and thermoelectric properties of BixSb2−xTe3 films was investigated. It was found that the grain size of nanocrystalline BixSb2−xTe3 films decreased when increasing the Bi content...
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