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Miniaturized hexapod MEMS microrobots with two kinds of actuators were described in this paper. The actuator of MEMS microrobots had two types which were shape memory alloy (SMA) actuator and piezoelectric (PZT) actuator. For PZT type microrobot, a piezoelectric element was affixed outside the rotor. The piezoelectric element would be expanded by electrical pulses and impacted on the rotor to generate...
This paper suggests the MEMS air turbine that used for the MEMS electromagnetic induction type generator. In the MEMS air turbine that employed the fluid dynamic bearing system, the gap between the magnet and the magnetic circuit and the eccentric motion of the rotor are problem in the high efficiency and the high output power. The developed MEMS air turbine has miniature silicon structure and the...
This paper proposes an electromagnetic induction type MEMS (Micro Electro Mechanical Systems) motor. The developed MEMS motor is combined the MEMS process and the multilayer ceramic technology. The MEMS process forms the silicon miniature components for a structural part. The multilayer ceramic technology fabricates a miniature ceramic magnetic circuit. This technology is possible to realize a miniature...
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