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This paper describes a bandpass SigmaDelta modulator employing a silicon micromechanical resonator as the loop filter. The micromechanical resonator is chosen primarily for its high quality factor and low power consumption. A 2nd-order prototype bandpass SigmaDelta modulator is realized in a 0.35-mum CMOS process and tested with a 19.6-MHz silicon micromechanical resonator. The measured results show...
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